GAS PANELS
Computer Designed
Completely Replaces existing panel
ROI Effective solution to old panels
Fully Customizable
GAS PANELS
There are major components when it comes to making good EPI. Solid wafer handling, stable temperature control, and a clean, reliable gas delivery system. Whether you’re running atmospheric, reduced pressure, a simple purpose-built, or a fully outfitted development gas panel, we can provide everything from spare parts to full roll-in replacement modules.
We’re also very happy to work with your engineering staff to customize a panel with your preference of components. If you’re only running Brooks MFCs in your fab, that’s no problem. Want to integrate a gas purification system, no problem.
MODULAR BUILDS
We’ve broken up the gas panel into individual kits, or modules. If you would like to add or replace an entire gas stick or loop, we can ship pre-assembled gas sticks ready to be installed in your existing panel. A complete kit that even includes the pneumatic fittings, pneumatic lines, cables, and screws to mount it. We’ll even include a bill of materials to identify and order spares in the future.
It’s this level of organization that allows us to quickly identify the individual parts you need or configure an entire panel to meet your processing goals.
ROLL IN REPLACEMENT MODULES
Born from our modular refurbishment program our roll-in gas panels can solve a wide variety of problems. For example, replacement of a 20-year-old gas system, major reconfiguration, or ATM to RP conversion.
QUICK ROI
Let’s consider a frequent component change for a moment. If you have a tool that was produced back in the 90s, most of the components in the gas panel are probably of similar vintage. There can be as many as 15 MFCs, 10 regulators, and 40 valves.
A single component failure can have an overall cost of $18,000 USD.
We’ll use a single component failure for instance and assume that a single tool can process 150 wafers per day at an average margin of $40 per wafer. This means a tool can generate a profit of $6000 per day. Now, if it takes 2 days to identify the failed component, and you’re lucky enough to have it on hand, another day to replace it and requalify it, that’s $18,000 failure. Not to mention the cost of the component and delivery.
If this happens 4 times a year, that’s $72,000 in downtime. It’s simple to start realizing the ROI in replacing the entire panel.
Consider the 1-year parts warranty, and it just gets better.
MANY REPLACEMENT OPTIONS
We can provide complete roll-in replacements, populated backplanes, individual gas sticks, and individual components.
Contact us today to discuss your gas panel needs. With video conferencing, we can take you through the modular build during the meeting.